1. Data Loading and Preprocessing

1.1 Edge Data

1.2 Surface Data

1.3 Calibration Wafer Data

1.4 Calibration Surface Data

1.5 Witness Surface Data

2. Surface Area Distribution Analysis

3. Edge Area Distribution Analysis

4. Calibration Wafer Analysis - Edge

5. Calibration Surface Analysis

6. Witness Surface Analysis

6. Edge Model Analysis

7. Straight Line Model (SLSM)

8. Error Stats

8. Trial Anlysis

8.1 Trial 9

8.2 Trial 10

8.2 Trial 10 with Error Bars

8.3 Trial 11

8.4 Trial 12

8.5 Trial 13

## TableGrob (3 x 1) "arrange": 3 grobs
##   z     cells    name                 grob
## 1 1 (1-1,1-1) arrange text[GRID.text.3109]
## 2 2 (2-2,1-1) arrange      gtable[arrange]
## 3 3 (3-3,1-1) arrange      gtable[arrange]

## TableGrob (3 x 1) "arrange": 3 grobs
##   z     cells    name                 grob
## 1 1 (1-1,1-1) arrange text[GRID.text.3832]
## 2 2 (2-2,1-1) arrange      gtable[arrange]
## 3 3 (3-3,1-1) arrange      gtable[arrange]

9. Combined Analysis and Comparison

9.1 Cumulative Comparison

9.2 Binned Comparison

10. Multiple Line analysis

11. Statistical Analysis

11.1 Trial 9

11.2 Trial 10

11.3 Trial 11

11.4 Trial 12

11.5 Cumulative Combined

11.6 Multiple Line

12. Paper Comparisons