1. Data Loading and Preprocessing
1.1 Edge Data
1.2 Surface Data
1.3 Calibration Wafer Data
1.4 Calibration Surface Data
1.5 Witness Surface Data
2. Surface Area Distribution Analysis
3. Edge Area Distribution Analysis
4. Calibration Wafer Analysis - Edge
5. Calibration Surface Analysis
6. Witness Surface Analysis
6. Edge Model Analysis
7. Straight Line Model (SLSM)
8. Error Stats
9. Combined Analysis and Comparison
10. Multiple Line analysis
11. Statistical Analysis
11.1 Trial 9
11.2 Trial 10
11.3 Trial 11
11.4 Trial 12
11.5 Cumulative Combined
11.6 Multiple Line
12. Paper Comparisons